Applied Materials, Inc. today introduced its breakthrough Applied Quantum(TM) X ion implanter, a single-wafer high-current system that enables transistor scaling to the 65nm node and beyond. The Quantum X system's high tilt (up to 60 degrees) and true zero degree implant capability, together with its precise energy control and low defect levels, provide semiconductor manufacturers with the process technology needed to achieve optimum transistor performance for next-generation devices. The Quantum X system also redefines implant productivity; its fast beam tuning and single-wafer processor deliver 30% higher productivity than existing high current implanters.
"The Quantum X system's breakthrough technology is its Stepscan(TM) single wafer implant processor that provides the process control to perform the most difficult and critical implants required for 65nm and 45nm logic and advanced DRAM manufacturing," said Craig Lowrie, vice president and general manager of Applied Materials' Implant division. "Leveraging our production-proven Quantum III beamline, the Quantum X's simple beam optics and short beamline enable faster beam tuning than any single-wafer system available today."
"For continued transistor scaling to 65nm and beyond, major innovations in ultra shallow junction process and manufacturing technology are critical," said Dr. Randhir Thakur, vice president and general manager of Applied Materials' Front End Products group. "By combining the Quantum X implanter with our established Applied Vantage(TM) RadiancePlus(TM) RTP spike anneal system, leading-edge customers now have the single-wafer process control necessary to enable unsurpassed junction uniformity and repeatability for optimal transistor performance in manufacturing."
Multiple Quantum X systems are already installed at a customer's site; additional orders have been received by logic and DRAM customers in the U.S., Europe and Asia.
The Applied Quantum X and Applied Vantage RadiancePlus RTP systems will be on display at SEMICON West on July 12-14 in San Francisco at Applied Materials' booth #1026. For more information on the Applied Quantum X implant system, please visit http://www.appliedmaterials.com/products/Quantum.
The original press release can be found
here.
Related stories:
Physicist's gadget lets you hear the sound of a perfect golf swing
Golf is a game of intense concentration. Golfers receive advice on the precise stance, grip, wrist angle, shoulder angle, head angle, and other details to improve their swings. But a new golf gadget developed by a Yale physics professor takes a different approach to golf training. Rather than focusing on the mechanics, the device lets players literally "tune in" to the sound of their swings.
Single photon detectors for telecommunications wavelengths
Practically speaking, single photon detection has not been something pursued very heavily at the wavelengths used for telecommunication signals. Part of the problem is that performance of single photon detectors are rather constrained at such long wavelengths. But, says Robert Thew, a scientist at the University of Geneva, the time is coming when single photon detectors may be needed in telecommunications.
Operating quantum memory at room temperature
Quantum dots, along with quantum wires, have been attracting notice over the past decade as possible building blocks of quantum information processing. Indium arsenide quantum dots (InAs) can be used for memory operations in devices made from gallium arsenide and aluminum gallium arsenide (known as GaAs/AlGaAs devices). The problem is that at room temperature – the experiments are usually done at lower temperatures, the memory operation of these devices suffers, unless there are multiple quantum dot layers.
Fast quantum computer building block created
(PhysOrg.com) -- The fastest quantum computer bit that exploits the main advantage of the qubit over the conventional bit has been demonstrated by researchers at University of Michigan, U.S. Naval Research Laboratory and the University of California at San Diego.
True properties of carbon nanotubes measured
For more than 15 years, carbon nanotubes (CNTs) have been the flagship material of nanotechnology. Researchers have conceived applications for nanotubes ranging from microelectronic devices to cancer therapy. Their atomic structure should, in theory, give them mechanical and electrical properties far superior to most common materials.
Large area transistors get helping hand from quantum effects
Researchers from the Hitachi Central Research Laboratory, Japan, and the Advanced Technology Institute of the University of Surrey today report that nano-designed transistors for the large area display and sensor application field benefit hugely from quantum size effects.
Quantum Chaos Unveiled?
(PhysOrg.com) -- A University of Utah study is shedding light on an important, unsolved physics problem: the relationship between chaos theory - which is based on 300-year-old Newtonian physics - and the modern theory of quantum mechanics.
Nanoparticles + light = dead tumor cells
Medical physicists at the University of Virginia have created a novel way to kill tumor cells using nanoparticles and light. The technique, devised by Wensha Yang, an instructor in radiation oncology at the University of Virginia, and colleagues Ke Sheng, Paul W. Read, James M. Larner, and Brian P. Helmke, employs quantum dots. Quantum dots are semiconductor nanostructures, 25 billionths of a meter in diameter, which can confine electrons in three dimensions and emit light when exposed to ultraviolet radiation.